Multi-DOF motion systems
Precise piezoelectric multi-DOF motion systems

Xeryon's linear and rotary stages can be combined to multi-DOF motion solutions. With our modular design, we can create custom and nanometric motion solutions that meet your requirements. Our linear stages for example can be assembled to a compact XY or XYZ stage. A selection of our multi-DOF motion solutions are shown below. Please contact us and we will configure your positioner with two or more degrees of freedom according to your needs.


This compact XY-stage consists of two XLS stages stacked on top of each other. This allows closed-loop positioning in 2-DOF with nanometre accuracy and repeatability. The working area ranges from 34 x 34 mm2 to 100 x 100 mm2 with a maximum load capacity of 1 kg. Because of the ultrasonic drive principle of the XLS stages, this XY-stage is fast (up to 400 mm/s) and noiseless. These features makes it the perfect choice for noise sensitive applications such as microscopy and material science. The XY-stage can be used in vacuum and customized to 3 three or more DOF's.

2D-rotary stage

This 2D-rotary stage consists of two XRT-U stages. It is very compact, noiseless and allows closed-loop positioning in 2-DOF with a very high angular resolution and small runout. Typical applications are in metrology, optics and photonics. The stage can be used in vacuum and customized to three or more DOF's.

Contact an engineer!

Do you have a question about one of our products or do you need a quote? Contact our sales enigneers.